Hysteresis compensation and positive velocity-position feedback resonance control of piezoelectric driven nanopositioning stage

SIMA Jinfu; LAI Leijie

doi:10.12299/jsues.24-0201

Volume 39 Issue 4

Dec. 2025

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Article Navigation > Journal of Shanghai University of Engineering Science > 2025 > 39(4): 428-434

SIMA Jinfu, LAI Leijie. Hysteresis compensation and positive velocity-position feedback resonance control of piezoelectric driven nanopositioning stage[J]. Journal of Shanghai University of Engineering Science, 2025, 39(4): 428-434. doi: 10.12299/jsues.24-0201

Citation:

SIMA Jinfu, LAI Leijie. Hysteresis compensation and positive velocity-position feedback resonance control of piezoelectric driven nanopositioning stage[J]. Journal of Shanghai University of Engineering Science, 2025, 39(4): 428-434. doi: 10.12299/jsues.24-0201

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Hysteresis compensation and positive velocity-position feedback resonance control of piezoelectric driven nanopositioning stage

doi: 10.12299/jsues.24-0201

SIMA Jinfu,
LAI Leijie^,

School of Mechanical and Automotive Engineering, Shanghai University of Engineering Science, Shanghai 201620, China

Received Date: 2024-07-12
Available Online: 2026-02-02
Publish Date: 2025-12-01

Abstract

Abstract

To address the hysteresis and low damping resonance problems of piezoelectric driven nanopositioning stages, a three-degree-of-freedom piezoelectric driven nanopositioning stage experimental system was constructed, and the hysteresis and resonance characteristics were analyzed. A rate-dependent Prandtl-Ishlinskii hysteresis model was established, and the parameters of its inverse model were identified. The effectiveness and accuracy of the model were verified through open-loop and close-loop feedforward compensation experiments. Subsequently, a pole placement method based on a Butterworth filter was employed to design the parameters of an integral tracking controller and a positive velocity-position feedback (PVPF) damping controller, and the effectiveness of the damping controller was verified. Finally, trajectory tracking experiments were conducted using a composite control method. The experimental results show that this method significantly improves the tracking accuracy and speed of the piezoelectric positioning stage, demonstrating the effectiveness of the proposed control method.
- piezoelectric actuators,
- nanopositioning stage,
- hysteresis model,
- inverse compensation,
- damping control

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References(13)

References

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