Design and analysis of a novel electromagnetically driven 6-DOF compliant mechanism for micro-positioning

XIE Chao; LAI Leijie

doi:10.12299/jsues.24-0235

Volume 40 Issue 1

Mar. 2026

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XIE Chao, LAI Leijie. Design and analysis of a novel electromagnetically driven 6-DOF compliant mechanism for micro-positioning[J]. Journal of Shanghai University of Engineering Science, 2026, 40(1): 10-17. doi: 10.12299/jsues.24-0235

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XIE Chao, LAI Leijie. Design and analysis of a novel electromagnetically driven 6-DOF compliant mechanism for micro-positioning[J]. Journal of Shanghai University of Engineering Science, 2026, 40(1): 10-17. doi: 10.12299/jsues.24-0235

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Design and analysis of a novel electromagnetically driven 6-DOF compliant mechanism for micro-positioning

doi: 10.12299/jsues.24-0235

XIE Chao,
LAI Leijie^,

School of Mechanical and Automotive Engineering, Shanghai University of Engineering Science, Shanghai 201620, China

Received Date: 2024-08-21
Available Online: 2026-05-27
Publish Date: 2026-03-01

Abstract

Abstract

To address the shortcomings of current six-degree-of-freedom (6-DOF) compliant mechanisms, such as limited travel range and large cumulative errors, a novel 6-DOF parallel compliant mechanism for electromagnetically driven micro-nano positioning was designed. Kinematic analysis was conducted on the components and structural characteristics of the new 6-DOF compliant positioning mechanism, and a kinematic model was established and derived. Furthermore, based on the force-deformation characteristics of the compliant units and the geometric characteristics of the parallel mechanism, a static compliance analytical model of the 6-DOF compliant mechanism was established using the compliance matrix method. The analytical model was verified through finite element software. The research results can provide a reference for the design and application of multi-degree-of-freedom micro-nano positioning platforms.
- six-degree-freedom (6-DOF),
- compliant mechanism,
- parallel mechanism,
- kinematics,
- compliance matrix

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References(17)

References

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