ZOU Wei, DAI Hui-liang, ZHONG Jian-an. Study on Step Magnifying Mechanism of Precise Planar Micro-Positioner[J]. Journal of Shanghai University of Engineering Science, 2008, 22(3): 218-221. doi: 10.3969/j.issn.1009-444X.2008.03.007
Citation:
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ZOU Wei, DAI Hui-liang, ZHONG Jian-an. Study on Step Magnifying Mechanism of Precise Planar Micro-Positioner[J]. Journal of Shanghai University of Engineering Science, 2008, 22(3): 218-221. doi: 10.3969/j.issn.1009-444X.2008.03.007
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ZOU Wei, DAI Hui-liang, ZHONG Jian-an. Study on Step Magnifying Mechanism of Precise Planar Micro-Positioner[J]. Journal of Shanghai University of Engineering Science, 2008, 22(3): 218-221. doi: 10.3969/j.issn.1009-444X.2008.03.007
Citation:
|
ZOU Wei, DAI Hui-liang, ZHONG Jian-an. Study on Step Magnifying Mechanism of Precise Planar Micro-Positioner[J]. Journal of Shanghai University of Engineering Science, 2008, 22(3): 218-221. doi: 10.3969/j.issn.1009-444X.2008.03.007
|
Study on Step Magnifying Mechanism of Precise Planar Micro-Positioner