Influence of Excitation Frequencies on Microsturcture of Nanocrystalline Silicon Thin Films

QIU Haining; HE Jia; CHEN Mengyue; REN Chao

doi:10.3969/j.issn.1009-444X.2012.03.015

Volume 26 Issue 3

Sep. 2012

Turn off MathJax

Article Contents

Article Navigation > Journal of Shanghai University of Engineering Science > 2012 > 26(3): 256-258

QIU Haining, HE Jia, CHEN Mengyue, REN Chao. Influence of Excitation Frequencies on Microsturcture of Nanocrystalline Silicon Thin Films[J]. Journal of Shanghai University of Engineering Science, 2012, 26(3): 256-258. doi: 10.3969/j.issn.1009-444X.2012.03.015

Citation:

QIU Haining, HE Jia, CHEN Mengyue, REN Chao. Influence of Excitation Frequencies on Microsturcture of Nanocrystalline Silicon Thin Films[J]. Journal of Shanghai University of Engineering Science, 2012, 26(3): 256-258. doi: 10.3969/j.issn.1009-444X.2012.03.015