WANG Rong, ZHANG Minliang. Improvement of Precision for a Micro-Displacement Table Based on Differential Theory and Sampling Compensation[J]. Journal of Shanghai University of Engineering Science, 2014, 28(4): 296-301. doi: 10.3969/j.issn.1009-444X.2014.04.002
Citation:
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WANG Rong, ZHANG Minliang. Improvement of Precision for a Micro-Displacement Table Based on Differential Theory and Sampling Compensation[J]. Journal of Shanghai University of Engineering Science, 2014, 28(4): 296-301. doi: 10.3969/j.issn.1009-444X.2014.04.002
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WANG Rong, ZHANG Minliang. Improvement of Precision for a Micro-Displacement Table Based on Differential Theory and Sampling Compensation[J]. Journal of Shanghai University of Engineering Science, 2014, 28(4): 296-301. doi: 10.3969/j.issn.1009-444X.2014.04.002
Citation:
|
WANG Rong, ZHANG Minliang. Improvement of Precision for a Micro-Displacement Table Based on Differential Theory and Sampling Compensation[J]. Journal of Shanghai University of Engineering Science, 2014, 28(4): 296-301. doi: 10.3969/j.issn.1009-444X.2014.04.002
|
Improvement of Precision for a Micro-Displacement Table Based on Differential Theory and Sampling Compensation