Volume 30 Issue 2
Jun.  2016
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Article Navigation >  Journal of Shanghai University of Engineering Science  > 2016  >  30(2): 122-127
GU Meimei, LI Hongqin. Effect of High Density Plasma Deposition Process on Particle Size[J]. Journal of Shanghai University of Engineering Science, 2016, 30(2): 122-127. doi: 10.3969/j.issn.1009-444X.2016.02.006
Citation: GU Meimei, LI Hongqin. Effect of High Density Plasma Deposition Process on Particle Size[J]. Journal of Shanghai University of Engineering Science, 2016, 30(2): 122-127. doi: 10.3969/j.issn.1009-444X.2016.02.006
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Effect of High Density Plasma Deposition Process on Particle Size

doi: 10.3969/j.issn.1009-444X.2016.02.006
  • Publish Date: 2016-06-30

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