Mechanism of Damage on Surface of Semiconductor Si Caused by Laser with Different Wavelengths

LIU Ye; ZHOU Xinling

doi:10.3969/j.issn.1009-444X.2008.02.002

Volume 22 Issue 2

Jun. 2008

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Article Navigation > Journal of Shanghai University of Engineering Science > 2008 > 22(2): 104-108

LIU Ye, ZHOU Xinling. Mechanism of Damage on Surface of Semiconductor Si Caused by Laser with Different Wavelengths[J]. Journal of Shanghai University of Engineering Science, 2008, 22(2): 104-108. doi: 10.3969/j.issn.1009-444X.2008.02.002

Citation:

LIU Ye, ZHOU Xinling. Mechanism of Damage on Surface of Semiconductor Si Caused by Laser with Different Wavelengths[J]. Journal of Shanghai University of Engineering Science, 2008, 22(2): 104-108. doi: 10.3969/j.issn.1009-444X.2008.02.002