Volume 25 Issue 3
Sep.  2011
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Article Navigation >  Journal of Shanghai University of Engineering Science  > 2011  >  25(3): 191-194
CHENG Wei-ming, JIANG Ke-zhuang, SUN Lin-zhi. Compensation of Temperature Effect on Precision Positioning Stage[J]. Journal of Shanghai University of Engineering Science, 2011, 25(3): 191-194. doi: 10.3969/j.issn.1009-444X.2011.03.001
Citation: CHENG Wei-ming, JIANG Ke-zhuang, SUN Lin-zhi. Compensation of Temperature Effect on Precision Positioning Stage[J]. Journal of Shanghai University of Engineering Science, 2011, 25(3): 191-194. doi: 10.3969/j.issn.1009-444X.2011.03.001
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Compensation of Temperature Effect on Precision Positioning Stage

doi: 10.3969/j.issn.1009-444X.2011.03.001
  • Publish Date: 2011-09-30

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